@misc{indiciae342886dd433e,
  title = {Precise Blaze Angle Measurements of Lithographically Fabricated Silicon Immersion Gratings},
  author = {Emily Lubar and Daniel T. Jaffe and Cynthia Brooks and Sierra Hickman and Michael Gully-Santiago and Gregory Mace},
  year = {2020},
  doi = {10.1117/12.2561128},
  url = {https://arxiv.org/abs/2012.07706},
  note = {Source identifier: 2012.07706}
}