TY  - RPRT
TI  - Precise Blaze Angle Measurements of Lithographically Fabricated Silicon Immersion Gratings
AU  - Emily Lubar
AU  - Daniel T. Jaffe
AU  - Cynthia Brooks
AU  - Sierra Hickman
AU  - Michael Gully-Santiago
AU  - Gregory Mace
PY  - 2020
DO  - 10.1117/12.2561128
UR  - https://arxiv.org/abs/2012.07706
ID  - 2012.07706
ER  -