@misc{indiciaeedf6aaa63a1c,
  title = {Structured light for ultrafast laser micro- and nanoprocessing},
  author = {Daniel Flamm and Daniel Günther Grossmann and Marc Sailer and Myriam Kaiser and Felix Zimmermann and Keyou Chen and Michael Jenne and Jonas Kleiner and Julian Hellstern and Christoph Tillkorn and Dirk H Sutter and Malte Kumkar},
  year = {2021},
  doi = {10.1117/1.oe.60.2.025105},
  url = {https://arxiv.org/abs/2012.10119},
  note = {Source identifier: 2012.10119}
}