@misc{indiciae007af9a6a871,
  title = {Diffusion processes in germanium and silicon films grown on Si\$\_3\$N\$\_4\$ substrates},
  author = {Larisa V. Arapkina and Kirill V. Chizh and Dmitry B. Stavrovskii and Vladimir P. Dubkov and Elizabeth P. Lazareva and Vladimir A. Yuryev},
  year = {2021},
  doi = {10.1016/j.solmat.2021.111231},
  url = {https://arxiv.org/abs/2012.10358},
  note = {Source identifier: 2012.10358}
}