TY  - RPRT
TI  - Diffusion processes in germanium and silicon films grown on Si$_3$N$_4$ substrates
AU  - Larisa V. Arapkina
AU  - Kirill V. Chizh
AU  - Dmitry B. Stavrovskii
AU  - Vladimir P. Dubkov
AU  - Elizabeth P. Lazareva
AU  - Vladimir A. Yuryev
PY  - 2021
DO  - 10.1016/j.solmat.2021.111231
UR  - https://arxiv.org/abs/2012.10358
ID  - 2012.10358
ER  -