@misc{indiciae93e3a4a9e217, title = {Beamline Spectroscopy of Integrated Circuits With Hard X-ray Transition Edge Sensors at the Advanced Photon Source}, author = {T. Guruswamy and L. Gades and A. Miceli and U. Patel and O. Quaranta}, year = {2021}, doi = {10.1109/tasc.2021.3067246}, url = {https://arxiv.org/abs/2012.11680}, note = {Source identifier: 2012.11680} }