@misc{indiciae5c6adbb0dd12,
  title = {Virtual IED sensor for df rf CCP discharges},
  author = {M. Bogdanova and D. Lopaev and T. Rakhimova and D. Voloshin and A. Zotovich and S. Zyryanov},
  year = {2020},
  doi = {10.1088/1361-6595/abf71b},
  url = {https://arxiv.org/abs/2012.14882},
  note = {Source identifier: 2012.14882}
}