@misc{indiciaead2787fe5e56, title = {TSV-integrated Surface Electrode Ion Trap for Scalable Quantum Information Processing}, author = {P. Zhao and J. -P. Likforman and H. Y. Li and J. Tao and T. Henner and Y. D. Lim and W. W. Seit and C. S. Tan and Luca Guidoni}, year = {2021}, doi = {10.1063/5.0042531}, url = {https://arxiv.org/abs/2101.00869}, note = {Source identifier: 2101.00869} }