@misc{indiciae1c852dd12570,
  title = {Fabrication of \$\textasciicircum{}\{15\}\textbackslash{}textrm\{NV\}\textasciicircum{}\{-\}\$ centers in diamond using a deterministic single ion implanter},
  author = {K. Groot-Berning and G. Jacob and C. Osterkamp and F. Jelezko and F. Schmidt-Kaler},
  year = {2021},
  doi = {10.1088/1367-2630/ac0753},
  url = {https://arxiv.org/abs/2101.01979},
  note = {Source identifier: 2101.01979}
}