TY  - RPRT
TI  - Fabrication of $^{15}\textrm{NV}^{-}$ centers in diamond using a deterministic single ion implanter
AU  - K. Groot-Berning
AU  - G. Jacob
AU  - C. Osterkamp
AU  - F. Jelezko
AU  - F. Schmidt-Kaler
PY  - 2021
DO  - 10.1088/1367-2630/ac0753
UR  - https://arxiv.org/abs/2101.01979
ID  - 2101.01979
ER  -