@misc{indiciae0bf9c1c6ff31,
  title = {Semi-insulating 4H-SiC lateral bulk acoustic wave resonators},
  author = {Boyang Jiang and Noah F. Opondo and Sunil A. Bhave},
  year = {2021},
  doi = {10.1063/5.0045232},
  url = {https://arxiv.org/abs/2101.03281},
  note = {Source identifier: 2101.03281}
}