TY  - RPRT
TI  - Semi-insulating 4H-SiC lateral bulk acoustic wave resonators
AU  - Boyang Jiang
AU  - Noah F. Opondo
AU  - Sunil A. Bhave
PY  - 2021
DO  - 10.1063/5.0045232
UR  - https://arxiv.org/abs/2101.03281
ID  - 2101.03281
ER  -