@misc{indiciae1af4fbc20276,
  title = {Atomic Layer Deposition of Aluminum (111) Thin Film by Dimethylethylaminealane Precursor},
  author = {Sameh Okasha and Yoshiaki Sekine and Satoshi Sasaki and Yuichi Harada},
  year = {2021},
  url = {https://arxiv.org/abs/2101.04366},
  note = {Source identifier: 2101.04366}
}