@misc{indiciae262c0bf117a6, title = {On the role of ion potential energy in low energy HiPIMS deposition: An atomistic simulation}, author = {Movaffaq Kateb and Jon Tomas Gudmundsson and Pascal Brault and Andrei Manolescu and Snorri Ingvarsson}, year = {2021}, url = {https://arxiv.org/abs/2101.05896}, note = {Source identifier: 2101.05896} }