TY  - RPRT
TI  - On the role of ion potential energy in low energy HiPIMS deposition: An atomistic simulation
AU  - Movaffaq Kateb
AU  - Jon Tomas Gudmundsson
AU  - Pascal Brault
AU  - Andrei Manolescu
AU  - Snorri Ingvarsson
PY  - 2021
UR  - https://arxiv.org/abs/2101.05896
ID  - 2101.05896
ER  -