@misc{indiciae8a120524e48f,
  title = {Quantifying residual stress in Helium implanted surfaces and its implication for blistering},
  author = {P. Hosemann and M. Sebastiani and M. Z. Mughal and X. Huang and A. Scott and M. Balooch},
  year = {2021},
  doi = {10.1557/s43578-021-00108-6},
  url = {https://arxiv.org/abs/2101.06780},
  note = {Source identifier: 2101.06780}
}