@misc{indiciae7425c12d6a72,
  title = {Quality assessment of in situ plasma etched diamond surfaces for CVD overgrowth},
  author = {J. Langer and V. Cimalla and M. Prescher and J. Ligl and B. Tegetmeyer and C. Schreyvogel and O. Ambacher},
  year = {2021},
  doi = {10.1002/pssa.202100035},
  url = {https://arxiv.org/abs/2101.07741},
  note = {Source identifier: 2101.07741}
}