TY  - RPRT
TI  - Quality assessment of in situ plasma etched diamond surfaces for CVD overgrowth
AU  - J. Langer
AU  - V. Cimalla
AU  - M. Prescher
AU  - J. Ligl
AU  - B. Tegetmeyer
AU  - C. Schreyvogel
AU  - O. Ambacher
PY  - 2021
DO  - 10.1002/pssa.202100035
UR  - https://arxiv.org/abs/2101.07741
ID  - 2101.07741
ER  -