@misc{indiciae0871617afbcc,
  title = {Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry},
  author = {Daniel Drury and Keisuke Yazawa and Allison Mis and Kevin Talley and Andriy Zakutayev and Geoff L. Brennecka},
  year = {2021},
  doi = {10.1002/pssr.202100043},
  url = {https://arxiv.org/abs/2101.08755},
  note = {Source identifier: 2101.08755}
}