TY  - RPRT
TI  - Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
AU  - Daniel Drury
AU  - Keisuke Yazawa
AU  - Allison Mis
AU  - Kevin Talley
AU  - Andriy Zakutayev
AU  - Geoff L. Brennecka
PY  - 2021
DO  - 10.1002/pssr.202100043
UR  - https://arxiv.org/abs/2101.08755
ID  - 2101.08755
ER  -