@misc{indiciaee7707470fa4c,
  title = {Nanohole etching in AlGaSb with Ga droplets},
  author = {Joonas Hilska and Abhiroop Chellu and Teemu Hakkarainen},
  year = {2021},
  doi = {10.1021/acs.cgd.1c00113},
  url = {https://arxiv.org/abs/2101.09106},
  note = {Source identifier: 2101.09106}
}