TY  - RPRT
TI  - Nanohole etching in AlGaSb with Ga droplets
AU  - Joonas Hilska
AU  - Abhiroop Chellu
AU  - Teemu Hakkarainen
PY  - 2021
DO  - 10.1021/acs.cgd.1c00113
UR  - https://arxiv.org/abs/2101.09106
ID  - 2101.09106
ER  -