@misc{indiciaebc18575b1246,
  title = {Boron and Barium Incorporation at the 4H-SiC/SiO2 Interface using a Laser Multi-Charged Ion Source},
  author = {Md Haider Shaim and Hani E. Elsayed-Ali},
  year = {2021},
  url = {https://arxiv.org/abs/2101.09630},
  note = {Source identifier: 2101.09630}
}