@misc{indiciaec678513df2bc,
  title = {Fabrication of photonic resonators in bulk 4H-SiC},
  author = {Otto Cranwell Schaeper and Johannes E. Fröch and Sejeong Kim and Zhao Mu and Milos Toth and Weibo Gao and Igor Aharonovich},
  year = {2021},
  url = {https://arxiv.org/abs/2101.09649},
  note = {Source identifier: 2101.09649}
}