@misc{indiciae59994a8fecf3,
  title = {Quantum electrodynamical formulation of photochemical acid generation and its implications on optical lithography},
  author = {Seungjin Lee},
  year = {2024},
  doi = {10.4218/etrij.2024-0127},
  url = {https://arxiv.org/abs/2101.12598},
  note = {Source identifier: 2101.12598}
}