TY  - RPRT
TI  - Quantum electrodynamical formulation of photochemical acid generation and its implications on optical lithography
AU  - Seungjin Lee
PY  - 2024
DO  - 10.4218/etrij.2024-0127
UR  - https://arxiv.org/abs/2101.12598
ID  - 2101.12598
ER  -