@misc{indiciaea1a6c9fe299b,
  title = {Scalable creation of silicon-vacancy color centers in diamond by ion implantation through a 1-\$μ\$m pinhole},
  author = {L. Hunold and S. Lagomarsino and A. M. Flatae and H. Kambalathmana and F. Sledz and S. Sciortino and N. Gelli and L. Giuntini and M. Agio},
  year = {2021},
  doi = {10.1002/qute.202100079},
  url = {https://arxiv.org/abs/2102.00076},
  note = {Source identifier: 2102.00076}
}