@misc{indiciae9697a4a2df97,
  title = {Precise Motion Control of Wafer Stages via Adaptive Neural Network and Fractional-Order Super-Twisting Algorithm},
  author = {Zhian Kuang and Liting Sun and Huijun Gao and Masayoshi Tomizuka},
  year = {2021},
  url = {https://arxiv.org/abs/2102.00368},
  note = {Source identifier: 2102.00368}
}