TY  - RPRT
TI  - Precise Motion Control of Wafer Stages via Adaptive Neural Network and Fractional-Order Super-Twisting Algorithm
AU  - Zhian Kuang
AU  - Liting Sun
AU  - Huijun Gao
AU  - Masayoshi Tomizuka
PY  - 2021
UR  - https://arxiv.org/abs/2102.00368
ID  - 2102.00368
ER  -