@misc{indiciaea2d91836d9ed,
  title = {ReaxFF Reactive Force Field Development for Cu/Si Systems and application to Copper Cluster Formation During Cu Diffusion Inside Silicon},
  author = {Kamyar Akbari Roshan and Mahdi Khajeh Talkhoncheh and Jonathan E. Mueller and William A. Goddard III and Adri C. T. van Duin},
  year = {2021},
  url = {https://arxiv.org/abs/2102.00943},
  note = {Source identifier: 2102.00943}
}