TY - RPRT TI - ReaxFF Reactive Force Field Development for Cu/Si Systems and application to Copper Cluster Formation During Cu Diffusion Inside Silicon AU - Kamyar Akbari Roshan AU - Mahdi Khajeh Talkhoncheh AU - Jonathan E. Mueller AU - William A. Goddard III AU - Adri C. T. van Duin PY - 2021 UR - https://arxiv.org/abs/2102.00943 ID - 2102.00943 ER -