@misc{indiciae1766e1d30fb9,
  title = {Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems},
  author = {Zhian Kuang and Liting Sun and Huijun Gao and Masayoshi Tomizuka},
  year = {2021},
  url = {https://arxiv.org/abs/2102.03540},
  note = {Source identifier: 2102.03540}
}