TY  - RPRT
TI  - Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems
AU  - Zhian Kuang
AU  - Liting Sun
AU  - Huijun Gao
AU  - Masayoshi Tomizuka
PY  - 2021
UR  - https://arxiv.org/abs/2102.03540
ID  - 2102.03540
ER  -