@misc{indiciae8c82b9918918, title = {A flexible 300 mm integrated Si MOS platform for electron- and hole-spin qubits exploration}, author = {R. Li and N. I. Dumoulin Stuyck and S. Kubicek and J. Jussot and B. T. Chan and F. A. Mohiyaddin and A. Elsayed and M. Shehata and G. Simion and C. Godfrin and Y. Canvel and Ts. Ivanov and L. Goux and B. Govoreanu and I. P. Radu}, year = {2021}, url = {https://arxiv.org/abs/2102.03929}, note = {Source identifier: 2102.03929} }