@misc{indiciaeaed795505d24,
  title = {cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM},
  author = {Ahmed M. Jasim and Xiaoqing He and Yangchuan Xing and Tommi A. White and Matthias J. Young},
  year = {2021},
  url = {https://arxiv.org/abs/2102.05726},
  note = {Source identifier: 2102.05726}
}