TY  - RPRT
TI  - cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM
AU  - Ahmed M. Jasim
AU  - Xiaoqing He
AU  - Yangchuan Xing
AU  - Tommi A. White
AU  - Matthias J. Young
PY  - 2021
UR  - https://arxiv.org/abs/2102.05726
ID  - 2102.05726
ER  -