@misc{indiciae2b1bbba607d1, title = {Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning}, author = {Anna Andrle and Philipp Hönicke and Grzegorz Gwalt and Philipp-Immanuel Schneider and Yves Kayser and Frank Siewert and Victor Soltwisch}, year = {2021}, doi = {10.3390/nano11071647}, url = {https://arxiv.org/abs/2102.06600}, note = {Source identifier: 2102.06600} }