TY  - RPRT
TI  - Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
AU  - Anna Andrle
AU  - Philipp Hönicke
AU  - Grzegorz Gwalt
AU  - Philipp-Immanuel Schneider
AU  - Yves Kayser
AU  - Frank Siewert
AU  - Victor Soltwisch
PY  - 2021
DO  - 10.3390/nano11071647
UR  - https://arxiv.org/abs/2102.06600
ID  - 2102.06600
ER  -