@misc{indiciae68f82ea85626,
  title = {Thermal and Oxidation Stability of Ti\$\_x\$W\$\_\{1-x\}\$ Diffusion Barriers Investigated by Soft and Hard X-ray Photoelectron Spectroscopy},
  author = {Curran Kalha and Sebastian Bichelmaier and Nathalie K. Fernando and Judith. V. Berens and Pardeep K. Thakur and Tien-Lin Lee and Julio. J. Gutiérrez-Moreno and Stephan Mohr and Laura E. Ratcliff and Michael Reisinger and Johannes Zechner and Michael Nelhiebel and Anna Regoutz},
  year = {2021},
  doi = {10.1063/5.0048304},
  url = {https://arxiv.org/abs/2102.09845},
  note = {Source identifier: 2102.09845}
}