TY - RPRT TI - Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration AU - Jake A. McCoy AU - Randall L. McEntaffer AU - Chad M. Eichfeld PY - 2021 DO - 10.1116/1.5048197 UR - https://arxiv.org/abs/2102.12359 ID - 2102.12359 ER -