@misc{indiciaea04ab859e3da,
  title = {Ion implantation in \textbackslash{}b\{eta\}-Ga2O3: physics and technology},
  author = {Alena Nikolskaya and Evgenia Okulich and Dmitry Korolev and Anton Stepanov and Dmitry Nikolichev and Alexey Mikhaylov and David Tetelbaum and Aleksei Almaev and Charles Airton Bolzan and Antônio Jr Buaczik and Raquel Giulian and Pedro Luis Grande and Ashok Kumar and Mahesh Kumar and Daniela Gogova},
  year = {2021},
  doi = {10.1116/6.0000928},
  url = {https://arxiv.org/abs/2102.13439},
  note = {Source identifier: 2102.13439}
}