@misc{indiciae54fcca970837,
  title = {PHIDL: Python CAD layout and geometry creation for nanolithography},
  author = {A. N. McCaughan and A. M. Tait and S. M. Buckley and D. M. Oh and J. T. Chiles and J. M. Shainline and S. W. Nam},
  year = {2021},
  doi = {10.1116/6.0001203},
  url = {https://arxiv.org/abs/2103.01152},
  note = {Source identifier: 2103.01152}
}