@misc{indiciae0f3660536f49,
  title = {Selective etching of (111)B-oriented \$Al\_x Ga\_\{1-x\} As\$-layers for epitaxial lift-off},
  author = {Tobias Henksmeier and Martin Eppinger and Bernhard Reineke and Thomas Zentgraf and Cedrik Meier and Dirk Reuter},
  year = {2021},
  doi = {10.1002/pssa.202000408},
  url = {https://arxiv.org/abs/2103.02466},
  note = {Source identifier: 2103.02466}
}