TY  - RPRT
TI  - Selective etching of (111)B-oriented $Al_x Ga_{1-x} As$-layers for epitaxial lift-off
AU  - Tobias Henksmeier
AU  - Martin Eppinger
AU  - Bernhard Reineke
AU  - Thomas Zentgraf
AU  - Cedrik Meier
AU  - Dirk Reuter
PY  - 2021
DO  - 10.1002/pssa.202000408
UR  - https://arxiv.org/abs/2103.02466
ID  - 2103.02466
ER  -