@misc{indiciaefd8efc05d8e4,
  title = {A fitting algorithm for optimizing ion implantation energies and fluences},
  author = {Pauli Kehayias and Jacob Henshaw and Maziar Saleh Ziabari and Michael Titze and Edward Bielejec and Michael P. Lilly and Andrew M. Mounce},
  year = {2021},
  doi = {10.1016/j.nimb.2021.05.014},
  url = {https://arxiv.org/abs/2103.02525},
  note = {Source identifier: 2103.02525}
}