TY  - RPRT
TI  - A fitting algorithm for optimizing ion implantation energies and fluences
AU  - Pauli Kehayias
AU  - Jacob Henshaw
AU  - Maziar Saleh Ziabari
AU  - Michael Titze
AU  - Edward Bielejec
AU  - Michael P. Lilly
AU  - Andrew M. Mounce
PY  - 2021
DO  - 10.1016/j.nimb.2021.05.014
UR  - https://arxiv.org/abs/2103.02525
ID  - 2103.02525
ER  -