@misc{indiciae79fc40abe23f,
  title = {On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering},
  author = {Analía Fernández Herrero and Victor Soltwisch and Mika Pflüger and Jana Puls and Frank Scholze},
  year = {2021},
  doi = {10.1364/oe.430416},
  url = {https://arxiv.org/abs/2103.03334},
  note = {Source identifier: 2103.03334}
}