TY  - RPRT
TI  - On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
AU  - Analía Fernández Herrero
AU  - Victor Soltwisch
AU  - Mika Pflüger
AU  - Jana Puls
AU  - Frank Scholze
PY  - 2021
DO  - 10.1364/oe.430416
UR  - https://arxiv.org/abs/2103.03334
ID  - 2103.03334
ER  -