TY  - RPRT
TI  - N2-H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation
AU  - Audrey Chatain
AU  - Miguel Jiménez-Redondo
AU  - Ludovic Vettier
AU  - Olivier Guaitella
AU  - Nathalie Carrasco
AU  - Luis Lemos Alves
AU  - Luis Marques
AU  - Guy Cernogora
PY  - 2021
DO  - 10.1088/1361-6595/ab9b1a
UR  - https://arxiv.org/abs/2103.04633
ID  - 2103.04633
ER  -