TY  - RPRT
TI  - N-type doping of LPCVD-grown \b{eta}-Ga2O3 thin films using solid-source germanium
AU  - Praneeth Ranga
AU  - Arkka Bhattacharyya
AU  - Luisa Whittaker-Brooks
AU  - Michael A. Scarpulla
AU  - Sriram Krishnamoorthy
PY  - 2021
DO  - 10.1116/6.0001004
UR  - https://arxiv.org/abs/2103.05166
ID  - 2103.05166
ER  -